BATCHSPRAY Acid
General features Throughput up to 150 wph: Intelligent wafer handling meets experienced wafer processing. Semi-automated: Once the batch is transferred to the chamber, the process flow is automated through several…
BATCHSPRAY Solvent
General features Non-uniformity <1%: Controlled wafer rotation combined with smart chemical spray gain leads to excellent uniformity. Throughput up to 150 wph: Intelligent wafer handling meets experienced wafer processing. Semi-automated:…
Vertical Laminar Flow Manual Wet Bench
Removable work surface Material Options: 304L or 316L stainless steel, FM-approved PVC-C, or white polypropylene Purged electrical compartments Exhaust failure alarm Emergency power off Welded sealed secondary containment Seismic anchors…
Wet Bench
High Throughput: Large‑volume platforms with automated multitasking abilities Precise Control: Local data logging, concentration control, and monitoring Minimal Footprint: The most compact yet efficient wet processing benches available Quality Compliant:…
Rear Linear Automated Wet Bench
Rear Linear Automated Wet Bench Overview The Rear Linear Automated Wet Bench (RLA) is engineered for automated, semi-automated, or multitasking operations, offering flexibility in wafer handling with a range of…
Front Linear Automated Wet Bench
Front Linear Automated Wet Bench Overview The Front Linear Automated (FLA) can run up to two cassettes/50 wafers. This chemical wet bench allows for accurate process control, high throughput, and…
Tigress Automated Wet Bench
Tigress Automated Wet Bench Overview As one of JST’s industry-leading automated wet benches, the Tigress Automated Wet Bench provides advanced automation in a compact footprint at a competitive price. It automates…
3-Axis Compact Automated Wet Bench
3-Axis Compact Automated Wet Bench Overview This powerful wet bench supports up to 200mm product size processing and is compatible with GaAs, InP, and other compound semiconductor or silicon substrates.…
Automated Wet Bench
The Automated Wet Bench: Consistently Efficient Results JST designs, manufactures, and services custom automated wet processing equipment that generates high-throughput and repeatable results with multi-tasking or cascading process scheduling…
IPA Dryers
JST offers two vapor drying systems: Closed Loop Vapor (CLV) IPA Vapor Dryer: The vapor is remotely generated and introduced into the chamber, mixing with water and displacing it. It’s…
Premium EPI Foreline Tube Cleaner
Designed for high-performance environments, this wet bench handles acids, bases, oxidizers, and other cleaning chemicals with ease. It features a dual-contained exhaust system, ensuring secure operation in cleanroom conditions. Its…
Solvent Photo-Bowl Cleaner
FAQs 1. Can it clean components beyond photo-bowls?Yes, it accommodates various track system parts. 2. Is the workspace fume-exhausted?Absolutely—it's fully ventilated for solvent safety. 3. Does it support flammable solvents?Yes,…